Voltage Control of the Resonance Frequency of Dielectric Electroactive Polymer (DEAP) Membranes
نویسندگان
چکیده
منابع مشابه
Voltage tuning of the resonance frequency of electroactive polymer membranes over a range of more than 75% [7362-14]
We report on a novel technique to control the resonance frequency of polymer membranes, without additional external actuators. An electrostatic force is used to apply compressive stress to a dielectric electroactive polymers membrane, consisting of a 25 micron thick, 1 to 4 mm diameter, polydimethylsiloxane (PDMS) film bonded onto patterned silicon or Pyrex wafers. Both sides of the membranes a...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2008
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2008.927741